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Semiconductor Applications

Microchip imaging

Lichroma was attached to a Nikon LV100 optical microscope in reflection mode. An decapsulated oxidised later of copper from a semiconductor chip was imaged. Three images were obtained using different illumination parameters. Red (fuscia) illumination resolved all the features in spite the oxidation of the copper tracks and gave a 3D effect. Lime green illumination allowed us to obtain a great looking image overall. A soft white illumination showed the real colours of the chip, however, some features look bleached.

Fuscia Illumination

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Lime Green Illumination

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Soft White Illumination

Microprocessor imaging

In the bellow's examples, Lichroma was attached again to a Nikon LV100 optical microscope in reflection mode. We decapsulated a commercial microprocessor with very small features, close to the diffraction limit of light. One can observe that white light illumination did not give us a satisfactory resolution, while different colours helped us to resolve the interconnection tracks of the microprocessor, albeit that they are separated by gaps with sizes beyond the diffraction limit of light. Playing with the illumination of the optical microscope enabled us to image features with a lateral resolution beyond the diffraction limit (of course, the illumination helped a lot, but also the fact that metal tracks lithographed onto a transparent substrate gave us a good contrast was an advantage).

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Warm White Illumination

Hibiscus Illumination

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Turquoise Illumination

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